http://www.systa.kr/index.html?div=search&search_word= Web15 apr. 2011 · In this paper we summarize our investigations into processing capability on the CLEAN TRACK TM LITHIUS Pro TM-i & TWINSCAN TM NXT:1950i litho cluster. Process performance with regards to critical dimension (CD) uniformity and defectivity are investigated to confirm adherence to ITRS 1 roadmaps specifications. Additionally, a …
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